Choice of the right measurement instrument Surface metrology

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^ gao, f; leach, r k; petzing, j; coupland, j m (2008). surface measurement errors using commercial scanning white light interferometers . measurement science , technology. 19: 015303. bibcode:2008mesct..19a5303g. doi:10.1088/0957-0233/19/1/015303. 
^ rhee, h. g.; vorburger, t. v.; lee, j. w.; fu, j (2005). discrepancies between roughness measurements obtained phase-shifting , white-light interferometry . applied optics. 44 (28): 5919–27. doi:10.1364/ao.44.005919. pmid 16231799. 






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